JPH0339837U - - Google Patents

Info

Publication number
JPH0339837U
JPH0339837U JP10067089U JP10067089U JPH0339837U JP H0339837 U JPH0339837 U JP H0339837U JP 10067089 U JP10067089 U JP 10067089U JP 10067089 U JP10067089 U JP 10067089U JP H0339837 U JPH0339837 U JP H0339837U
Authority
JP
Japan
Prior art keywords
wafer
vacuum container
chamber
plasma
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10067089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10067089U priority Critical patent/JPH0339837U/ja
Publication of JPH0339837U publication Critical patent/JPH0339837U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Drying Of Semiconductors (AREA)
JP10067089U 1989-08-29 1989-08-29 Pending JPH0339837U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10067089U JPH0339837U (en]) 1989-08-29 1989-08-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10067089U JPH0339837U (en]) 1989-08-29 1989-08-29

Publications (1)

Publication Number Publication Date
JPH0339837U true JPH0339837U (en]) 1991-04-17

Family

ID=31649663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10067089U Pending JPH0339837U (en]) 1989-08-29 1989-08-29

Country Status (1)

Country Link
JP (1) JPH0339837U (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006248706A (ja) * 2005-03-11 2006-09-21 Okura Ind Co Ltd ゴミ袋
JP2008273717A (ja) * 2007-05-02 2008-11-13 Nippon Film Kk ゴミ袋

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5561026A (en) * 1978-10-30 1980-05-08 Chiyou Lsi Gijutsu Kenkyu Kumiai Gas plasma etching device
JPS58165323A (ja) * 1982-03-25 1983-09-30 Nec Corp ドライエツチング方法およびその装置
JPS63141319A (ja) * 1986-12-03 1988-06-13 Mitsubishi Electric Corp ドライエツチング処理装置
JPS63164431A (ja) * 1986-12-26 1988-07-07 Matsushita Electric Ind Co Ltd ドライエツチング装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5561026A (en) * 1978-10-30 1980-05-08 Chiyou Lsi Gijutsu Kenkyu Kumiai Gas plasma etching device
JPS58165323A (ja) * 1982-03-25 1983-09-30 Nec Corp ドライエツチング方法およびその装置
JPS63141319A (ja) * 1986-12-03 1988-06-13 Mitsubishi Electric Corp ドライエツチング処理装置
JPS63164431A (ja) * 1986-12-26 1988-07-07 Matsushita Electric Ind Co Ltd ドライエツチング装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006248706A (ja) * 2005-03-11 2006-09-21 Okura Ind Co Ltd ゴミ袋
JP2008273717A (ja) * 2007-05-02 2008-11-13 Nippon Film Kk ゴミ袋

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